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Browsing by Author "Van wonterghem, S."

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    Nanoscale etching: dissolution of III-As and Ge in HCl/H2O2 solutions

    van Dorp, Dennis  
    ;
    Weinberger, David
    ;
    Van wonterghem, S.
    ;
    Arnauts, Sophia  
    ;
    Strubbe, Katrien
    Proceedings paper
    2015-10, Semiconductor Cleaning Science and Technology 14 - SCST 14, 11/10/2015, p.235-242

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