Browsing by Author "Vandenberg, J.A."
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Publication Assessment of the near-surface profiling capabilities of SIMS
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.165Publication Characterization of low energy (2-5keV) implantation into Si
Oral presentation2002, Ion Implantation ConferencePublication Errors in near-surface and interfacial profiling of boron and arsenic
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics, 14/09/2003, p.618-631Publication Near-surface B/As profiling with SIMS: (in)solvable problems?
Meeting abstract2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.233