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Browsing by Author "Vandenberg, J.A."

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    Assessment of the near-surface profiling capabilities of SIMS

    Vandervorst, Wilfried  
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    Janssens, Tom
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    Fruehauf, Jens
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    Ross, I.M.
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    Cullis, A.
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    Vandenberg, J.A.
    Meeting abstract
    2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.165
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    Characterization of low energy (2-5keV) implantation into Si

    Collart, E.J.
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    Kirkwood, D.
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    Vandenberg, J.A.
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    Werner, M.
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    Vandervorst, Wilfried  
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    Brijs, Bert
    Oral presentation
    2002, Ion Implantation Conference
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    Errors in near-surface and interfacial profiling of boron and arsenic

    Vandervorst, Wilfried  
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    Janssens, Tom
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    Brijs, Bert
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    Conard, Thierry  
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    Huyghebaert, Cedric  
    Proceedings paper
    2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics, 14/09/2003, p.618-631
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    Near-surface B/As profiling with SIMS: (in)solvable problems?

    Vandervorst, Wilfried  
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    Geenen, Luc
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    Huyghebaert, Cedric  
    ;
    Fruehauf, Jens
    ;
    Bergmaier, A.
    Meeting abstract
    2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.233

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