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Browsing by Author "Vanderheyden, Rudi"

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    Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterization

    Le, Quoc Toan  
    ;
    Van Olmen, Jan  
    ;
    Vanderheyden, Rudi
    ;
    Kesters, Els  
    ;
    Kenis, Karine  
    ;
    Conard, Thierry  
    Proceedings paper
    2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 16/10/2005, p.164-171

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