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Browsing by Author "Vandermot, Ief"

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    Metal contamination on silicon surfaces from solvents

    Bearda, Twan
    ;
    Vandermot, Ief
    ;
    Van den Broeck, Kristel
    ;
    Van Hoornick, Nausikaa  
    Proceedings paper
    2005, Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium, 20/09/2004, p.269-272
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    Publication

    Metal contamination on silicon surfaces from solvents

    Bearda, Twan
    ;
    Vandermot, Ief
    ;
    Van den Broeck, Kristel
    ;
    Van Hoornick, Nausikaa  
    Oral presentation
    2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

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