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Browsing by Author "Varghese, Susan Sherin Kadeparambil"

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    Depth-of-Focus enhancement in High-Numerical Aperture EUV lithography by source and mask optimization

    Libeert, Guillaume  
    ;
    Franke, Joern-Holger  
    ;
    Leitao, Sofia
    ;
    Davydova, Natalia
    Proceedings paper
    2025, PHOTOMASK TECHNOLOGY 2025, 2025-09-22, p.136870P

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