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Browsing by Author "Vatel, Oliver"

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    Surface reconstruction of hydrogen annealed (100) silicon

    Bender, Hugo  
    ;
    Verhaverbeke, Steven
    ;
    Caymax, Matty  
    ;
    Vatel, Oliver
    ;
    Heyns, Marc  
    Journal article
    1994, Journal of Applied Physics, (75) 2, p.1207-1209
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    The IMEC Clean concept : an advanced wafer cleaning technology

    Meuris, Marc  
    ;
    Verhaverbeke, Steven
    ;
    Mertens, Paul  
    ;
    Schmidt, Harald
    ;
    Rotondaro, Antonio
    Oral presentation
    1994, 23rd Symposium on ULSI Ultra Clean Technology

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