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Browsing by Author "Velasco, H."

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    ALCVD hafnium silicates for low power gate stacks

    Maes, Jan  
    ;
    Laitinen, O.
    ;
    De Witte, Hilde
    ;
    Deweerd, Wim
    ;
    Delabie, Annelies  
    ;
    Conard, Thierry  
    Oral presentation
    2004, Atomic Layer Deposition Conference
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    Nitrided hafnium silicates for gate dielectrics

    Wang, C.G.
    ;
    Velasco, H.
    ;
    Verghese, M.
    ;
    Shero, E.
    ;
    Wilk, G.
    ;
    Maes, Jan  
    ;
    Laitinen, O.
    ;
    Deweerd, Wim
    Meeting abstract
    2004, AVS 51st International Symposium, 14/11/2004, p.DI-MoA5

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