Browsing by Author "Veltens, J."
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Publication Aging phenomena in the removal of nano-particles from Si wafers
; ; Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.151-154Publication Cleaning uniformity of silicon wafers in megasonic tanks
Oral presentation2003, Ultrasonics InternationalPublication Evaluation of megasonic cleaning systems for particle removal efficiency and damaging
Meeting abstract2003, 204th Meeting of the Electrochemical Society: 8th Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing, 13/10/2003