Browsing by Author "Verch, Andreas"

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Fundamental understanding and experimental verification of bright versus dark field imaging

Davydova, Natalia
;
Finders, Jo
;
van Lare, Claire
;
McNamara, John
;
Van Setten, Eelco
;
Zekry, Joseph
Proceedings paper
2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.115170P
High-NA Benefit Assessment through ZEISS AIMS EUV for Tip-to-Tip Patterning by EUVL

Jonckheere, Rik
;
Kovalevich, Tatiana
;
Wiaux, Vincent
;
Philipsen, Vicky
;
Hendrickx, Eric
Proceedings paper
2024, OPTICAL AND EUV NANOLITHOGRAPHY XXXVII, 2024-02-26, p.1295304