Browsing by Author "Verstraete, Kurt"
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Publication Analysis of trace metals in silicon nitride films by a vapor phase decomposition - solution collection approach
Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.139-146Publication Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach
Journal article2000, Journal of the Electrochemical Society, (147) 4, p.1499-1501