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Browsing by Author "Vertesy, Z."

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    Anisotropic etching of silicon in a two-component alkaline solution

    Vazsonyi, E.
    ;
    Vertesy, Z.
    ;
    Toth, A.
    ;
    Szlufcik, Jozef  
    Journal article
    2003, Journal of Micromechanics and Microengineering, (13) 2, p.165-169

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