Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Vigliante, A."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation

    Beggiato, Matteo  
    ;
    Loo, Roger  
    ;
    Wei, S.
    ;
    Moussa, Alain  
    ;
    Bast, G.
    ;
    Fukaya, K.
    ;
    Cerbu, Dorin  
    Proceedings paper
    2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.1342612-1

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings