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    Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry

    Marsik, Premysl
    ;
    Urbanowicz, Adam
    ;
    Vinokur, Klara
    ;
    Cohen, Yoel
    ;
    Baklanov, Mikhaïl
    Proceedings paper
    2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.1079-N07-04

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