Browsing by Author "Vinokur, Klara"
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Publication Changes of UV optical properties of plasma damaged low-k dielectrics for sidewall damage scatterometry
;Marsik, Premysl ;Urbanowicz, Adam ;Vinokur, Klara ;Cohen, YoelBaklanov, MikhaïlProceedings paper2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.1079-N07-04