Browsing by Author "Vishnevsky, A."
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Publication Investigation of plasma damage of low-k dielectrics during cryogenic etching
;Rezvanov, A. ;Miakonkikh, A. ;Vishnevsky, A. ;Gutshin, O. ;Gornev, E.Krasnikov, G.Proceedings paper2015, Microelectronics - 2015, 28/09/2015