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Browsing by Author "Vishnevsky, A."

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    Investigation of plasma damage of low-k dielectrics during cryogenic etching

    Rezvanov, A.
    ;
    Miakonkikh, A.
    ;
    Vishnevsky, A.
    ;
    Gutshin, O.
    ;
    Gornev, E.
    ;
    Krasnikov, G.
    Proceedings paper
    2015, Microelectronics - 2015, 28/09/2015

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