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Browsing by Author "Vloeberghs, H."

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    Characterization and optimization of positive tone DUV resists on TiN substrates

    Zandbergen, Peter
    ;
    Gehoel-van Ansem, W.
    ;
    Vandenberghe, Geert  
    ;
    Van Driessche, Veerle  
    Proceedings paper
    1997, Advances in Resist Technology and Processing XIV, 10/03/1997, p.314-323

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