Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Vogt, Tatjana"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Characterization of 248nm deep ultraviolet (DUV) photoresist after ion implantation

    Tsvetanova, Diana  
    ;
    Vos, Rita  
    ;
    Vereecke, Guy  
    ;
    Clemente, Francesca
    ;
    Vanstreels, Kris  
    Proceedings paper
    2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.187-194

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings