Browsing by Author "Vroom, R."

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Alternative post-etch polymer removal in a single-wafer platform

Dundas, C.
;
Vroom, R.
;
Ghekiere, John
;
Van Doorne, Patrick
;
Rink, I.
;
Sharp, I.
;
Heffernan, S.
Proceedings paper
2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.247-251
The use of ozonated water as a resist strip and post ash clean in a production fab

Vroom, R.
;
De Gendt, Stefan
Proceedings paper
1999, Proceedings 1999 IEEE International Symposium on Semiconductor Manufacturing Conference, 11/10/1999, p.165-168