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Browsing by Author "Vyas, Shashi"

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    Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

    Herregods, Sebastiaan  
    ;
    Laurent, Lecordier
    ;
    Vyas, Shashi
    ;
    Chan, BT  
    ;
    Delande, Tinne  
    ;
    Hetel, Iulian  
    Meeting abstract
    2017, Joint EuroCVD 21 - Baltic ALD 15, 11/06/2017

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