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Browsing by Author "Vyncke, Alex"

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    Publication

    Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance

    Wostyn, Kurt  
    ;
    Rondas, Dirk  
    ;
    Loo, Roger  
    ;
    Dhayalan, Sathish Kumar
    ;
    Hikavyy, Andriy  
    ;
    Elskens, Wim  
    Meeting abstract
    2015, E-MRS Fall Symposium: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques and Applications, 15/09/2015

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