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Browsing by Author "Wada, M."

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    Publication

    Cleaning aspects of novel materials after CMP

    Vos, Rita  
    ;
    Wada, M.
    ;
    Arnauts, Sophia  
    ;
    Takahashi, H.
    ;
    Cuypers, Daniel
    ;
    Struyf, Herbert  
    Proceedings paper
    2011, CMP and Post-CMP Cleaning, 14/03/2011, p.671-676
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    Electrical evaluation of stiction during drying of high aspect ratio nanostructures

    Pacco, Antoine  
    ;
    Wada, M.
    Meeting abstract
    2008, 34th International Conference on Micro & Nano Engineering - MNE, 15/09/2008

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