Browsing by Author "Waiblinger, Markus"
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Publication Ebeam based mask repair as door opener for defect free EUV masks
Proceedings paper2012, Photomask Technology, 11/09/2012, p.85221MPublication Repair of natural EUV reticle defects
Proceedings paper2011, Photomask technology 2011, 19/09/2011, p.81661GPublication Study of multilayer defects on sub-32nm HP EUV reticles
Oral presentation2012, International Symposium on Extreme Ultraviolet Lithography - EUVLPublication The door opener for EUV mask repair
Proceedings paper2012, Photomask and Next-Generation Lithography Mask Technology XIX, 17/04/2012, p.84410F