Browsing by Author "Walikar, A."
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Publication Fabrication of Solid-State Nanopores with EUV Lithography
Proceedings paper2025, IEEE International Electron Devices Meeting (IEDM), 2025-12-06Publication Wafer-Scale Maskless Process to Fabricate Sub-20nm Silicon Nitride Nanopores for Ultrafiltration
Proceedings paper2026, Novel Patterning Technologies, 2026-02-22, p.1398212