Browsing by Author "Wan, Lingshu"
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Publication Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering
Oral presentation2014, SPIE Advanced Lithography ConferencePublication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241N