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Browsing by Author "Wang, C. - G."

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    ALCVD hafnium silicates for low power gate stacks

    Maes, Jan  
    ;
    Laitinen, O.
    ;
    De Witte, Hilde
    ;
    Deweerd, Wim
    ;
    Delabie, Annelies  
    ;
    Conard, Thierry  
    Oral presentation
    2004, Atomic Layer Deposition Conference

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