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Browsing by Author "Wang, C.G"

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    Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O

    Fedorenko, Yanina
    ;
    Swerts, Johan  
    ;
    Maes, Jan  
    ;
    Tois, E.
    ;
    Haukka, S.
    ;
    Wang, C.G
    ;
    Wilk, G.
    Journal article
    2007, Electrochemical and Solid-State Letters, (10) 5, p.H149-H152

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