Browsing by Author "Wang, C.G"
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Publication Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O
Journal article2007, Electrochemical and Solid-State Letters, (10) 5, p.H149-H152
Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O