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    Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3

    Wang, Lily
    ;
    Dimitrijev, Sima
    ;
    Han, Jisheng
    ;
    Iacopi, Francesca
    ;
    Zou, Jin
    Journal article
    2009, Journal of Crystal Growth, (311) 19, p.4442-4446

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