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Browsing by Author "Wang, You-Nian"

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    Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime

    Zhang, Yu-Ru
    ;
    Tinck, Stefan
    ;
    De Schepper, Peter  
    ;
    Wang, You-Nian
    ;
    Bogaerts, Annemie
    Journal article
    2015, Journal of Vacuum Science and Technology A, (33) 2, p.21310

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