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    Laser-induced crystallization of SiGe MEMS structural layers deposited at temperatures below 250C

    El Rifai, Joumana
    ;
    Sedky, Sherif
    ;
    Wasfi, Rami
    ;
    Van Hoof, Chris  
    ;
    Witvrouw, Ann
    Proceedings paper
    2009, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology, 13/04/2009, p.1153-A19-03

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