Browsing by Author "Wauschkuhn, Nils"
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Publication Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques
;Hoenicke, Philipp ;Kayser, Yves ;Soltwisch, Victor ;Waehlish, AndreWauschkuhn, NilsProceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023