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Browsing by Author "Weeks, K.D."

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    Publication

    Advanced processes for Si:P and Si:C:P epitaxial growth and low-temperature surface cleaning

    Profijt, Harald
    ;
    Rosseel, Erik  
    ;
    Tolle, John
    ;
    Weeks, K.D.
    ;
    Loo, Roger  
    ;
    Mehta, Sandeep
    ;
    Maes, Jan  
    Meeting abstract
    2014-11, Workshop on Atomically Controlled Processing for Ultra-large Scale Integration, 13/11/2014

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