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Browsing by Author "Wells, Gregg"

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    The importance of dynamic contact angles in immersion lithography and how to measure them

    Fyen, Wim
    ;
    Wells, Gregg
    ;
    Kocsis, Michael  
    ;
    Kim, H-W
    ;
    Maenhoudt, Mireille
    Oral presentation
    2005, 2nd International Symposium on Immersion Lithography

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