Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Wendt, Kay"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Bare wafer analysis for wet cleaning efficiency – The impact of classification and sensitivity

    Wendt, Kay
    ;
    Wilbers, Fabian
    ;
    Ruth, Jochen  
    ;
    Lorant, Christophe  
    ;
    Holsteyns, Frank  
    ;
    Newby, John
    Proceedings paper
    2018, 29th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 30/04/2018, p.1-3

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings