Browsing by Author "White, Michael"

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Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nm

Lieten, Ruben
;
White, Daniela
;
Parson, Thomas
;
Jenq, Shining
;
Frye, Don
;
White, Michael
Proceedings paper
2017-10, International Conference on Planarization Technology - ICPT, 11/10/2017
Post-CMP cleaners for tungsten at advanced nodes

Lieten, Ruben
;
White, Daniela
;
Parson, Thomas
;
Jenq, Shining
;
Frye, Don
;
White, Michael
Proceedings paper
2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016