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Browsing by Author "Whittaker, Andrew"

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    Publication

    Poly(olefin sulfone)s - A materials platform for studying resist derived contamination

    Lawrie, Kirsten
    ;
    Blakey, Idriss
    ;
    Blinco, James
    ;
    Gronheid, Roel  
    ;
    Jack, Kevin
    ;
    Pollentier, Ivan  
    Proceedings paper
    2010, International Symposium on Extreme Ultraviolet Lithography, 18/10/2010

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