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Browsing by Author "Witters, J."

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    Fundamental study of atomic layer deposition in and on porous low-k films

    Verdonck, Patrick  
    ;
    Delabie, Annelies  
    ;
    Swerts, Johan  
    ;
    Farrell, L
    ;
    Baklanov, Mikhaïl
    Proceedings paper
    2011, IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM, 8/05/2011, p.P1.10

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