Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Woicik, J.C."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Preliminary hard X-ray micro-spectroscopic investigations on thin-film Ta-and-W based diffusion barriers for copper interconnect technology

    Ablett, J.M.
    ;
    Woicik, J.C.
    ;
    Tokei, Zsolt  
    Proceedings paper
    2007, 9th International Conference on Synchrotron Radiation Instrumentation, 28/05/2006, p.1557-1560

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings