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Browsing by Author "Wolf, Alexander"

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    Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions

    Bekaert, Joost  
    ;
    Van Look, Lieve  
    ;
    Vandenberghe, Geert  
    ;
    Van Adrichem, Paul  
    ;
    Maslow, Mark J.
    Proceedings paper
    2011, Optical Microlithography XXIV, 27/02/2011, p.79730V

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