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Browsing by Author "Wolf, Heiko"

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    Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer

    de Marneffe, Jean-Francois  
    ;
    Chan, BT  
    ;
    Spieser, Martin
    ;
    Vereecke, Guy  
    ;
    Naumov, Sergej
    Journal article
    2018, ACS Nano, (12) 11, p.11152-11160

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