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Browsing by Author "Womington, Matthew"

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    High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices

    Ryan, Paul
    ;
    Womington, Matthew
    ;
    Sun, Jianwu
    ;
    Hikavyy, Andriy  
    ;
    Shimura, Yosuke
    ;
    Witters, Liesbeth  
    Proceedings paper
    2015, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 14/04/2015, p.217-219

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