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Browsing by Author "Wortelboer, R."

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    Calibration of straight total reflection X-ray fluorescence spectrometry - results of a European round robin test

    Rink, I.
    ;
    Rostam-Khani, P.
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    Knoth, J.
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    Schwenke, H.
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    De Gendt, Stefan  
    ;
    Wortelboer, R.
    Journal article
    2001, Spectrochimica Acta Part B-Atomic Spectroscopy, (56) 11, p.2283-2292
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    Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation system

    De Gendt, Stefan  
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    Arnauts, Sophia  
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    Witters, Thomas  
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    Boehme, W.
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    Gonchond, J. P.
    ;
    Huber, A.
    Proceedings paper
    2000, Cleaning Technology in Semiconductor Device Manufacturing. Proceedings of the 6th International Symposium, 17/10/1999, p.593-600
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    Vapor phase decomposition - droplet collection: Evalutation of a wafer surface preparation system

    De Gendt, Stefan  
    ;
    Arnauts, Sophia  
    ;
    Witters, Thomas  
    ;
    Rink, I.
    ;
    Wortelboer, R.
    ;
    Huber, A.
    Meeting abstract
    1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1125

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