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Browsing by Author "Worth, W."

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    Evaluation of ozonated water spray for resist cleaning applications

    De Gendt, Stefan  
    ;
    Lux, Marcel  
    ;
    Claes, Martine  
    ;
    Van Hoeymissen, Jan
    ;
    Conard, Thierry  
    ;
    Worth, W.
    Proceedings paper
    2000, Cleaning Technology in Semiconductor Device Manufacturing. Proceedings of the 6th International Symposium, 17/10/1999, p.391-398

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