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Browsing by Author "WorthA, W."

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    TOFSIMS evaluation of the removal of resists on silicon by ozone-based cleaning

    Conard, Thierry  
    ;
    Kenens, Conny
    ;
    De Gendt, Stefan  
    ;
    Claes, Martine  
    ;
    Lagrange, Sébastien
    ;
    WorthA, W.
    Proceedings paper
    2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.631-634

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