Browsing by Author "WorthA, W."
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Publication TOFSIMS evaluation of the removal of resists on silicon by ozone-based cleaning
; ;Kenens, Conny; ; ;Lagrange, SébastienWorthA, W.Proceedings paper2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.631-634