Browsing by Author "Wu, Aiwen"
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Publication Continuous improvements of defectivity rates in immersion photolithography via functionalized membranes in point-of-use photochemical filtration
Proceedings paper2017, Advances in Patterning Materials and Processes XXXIV, 26/02/2017, p.101462APublication Improving EUV underlayer coating defectivity using point-of-use filtration
Proceedings paper2020, Advances in Patterning Materials and Processes XXXVII, 23/02/2020, p.113261ZPublication Optimization of Point-Of-Use Filtration for Metal Oxide Photoresist
Proceedings paper2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120X