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Browsing by Author "Wu, Timothy"

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    Ultimate contact hole resolution using immersion lithography with line/space imaging

    Truffert, Vincent  
    ;
    Bekaert, Joost  
    ;
    Lazzarino, Frederic  
    ;
    Maenhoudt, Mireille
    ;
    Miller, Andy  
    Proceedings paper
    2009, Optical Microlithography XXII, 22/02/2009, p.72740N

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