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Browsing by Author "Xu, W."

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    Germanium doping for improved silicon substrates and devices

    Vanhellemont, J.
    ;
    Chen, J.
    ;
    Lauwaert, J.
    ;
    Vrielinck, H.
    ;
    Xu, W.
    ;
    Yang, D.
    ;
    Rafi, J.M.
    ;
    Ohyama, H.
    Journal article
    2011, Journal of Crystal Growth, (317) 1, p.8-15
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    Germanium doping of Si substrates for improved device characteristics and yield

    Vanhellemont, Jan
    ;
    Chen, J.
    ;
    Xu, W.
    ;
    Yang, D.
    ;
    Rafi, J.M.
    ;
    Ohyama, H.
    ;
    Simoen, Eddy  
    Proceedings paper
    2010, China Semiconductor Technology International Conference - CSTIC, 18/03/2010, p.1041-1046

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