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Browsing by Author "Xue, Ran"

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    State-of-the-art of EUV materials for N5 logic and DRAM applications

    De Simone, Danilo  
    ;
    Vesters, Yannick
    ;
    Vanelderen, Pieter  
    ;
    Xue, Ran
    ;
    Pollentier, Ivan  
    Proceedings paper
    2018, International Conference on Extreme Ultraviolet Lithography - EUVL, 16/09/2018, p.108090U

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