Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Yan, Qiliang"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Binary modeling method to check the sub-resolution assist features (SRAFs) printability

    Li, Jianliang
    ;
    Gao, Weimin
    ;
    Fan, Yongfa
    ;
    Xue, Jing
    ;
    Yan, Qiliang
    ;
    Lucas, Kevin
    ;
    De Bisschop, Peter  
    Proceedings paper
    2012, Optical Microlithography XXV, 12/02/2012, p.83261D

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings