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Browsing by Author "Yang, G."

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    Characterization of slurry system and suppression of oxide erosion in aluminun CMP (chemical-mechanical planarization)

    Zhong, L.
    ;
    Yang, G.
    ;
    Holland, K.
    ;
    Grillaert, Joost
    ;
    Devriendt, Katia  
    ;
    Heylen, Nancy  
    ;
    Meuris, Marc  
    Proceedings paper
    2000, Chemical-Mechanical Polishing - Fundamentals and Challenges, 5/04/1999, p.115-120

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