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Browsing by Author "Yannakopolou, K."

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    Lithographic evaluation of a new wet silylation process using safe solvents and the commercial photoresist AZ 5214E

    Gogolides, E.
    ;
    Baik, Ki-Ho
    ;
    Yannakopolou, K.
    ;
    Van den hove, Luc  
    Journal article
    1994, Microelectron. Eng., 23, p.267-270

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