Browsing by Author "Yanovich, S."

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Application of fully fluorinated cyclic saturated hydrocarbons for highly selective nanoscale silicon dioxide reactive ion etching

Yanovich, S.
;
Baklanov, Mikhaïl
;
Orlov, S.
;
Gushchin, O.
;
Zaitsev, N.
;
Ignatov, P.
;
Yafarov, R.
Meeting abstract
2012, Plasma Etch and Strip in Microelectronics - PESM, 15/03/2012
Auto-emission device with nano-diamond cathode

Gutschin, O.
;
Zaitsev, N.
;
Ignatov, P.
;
Yanovich, S.
;
Orlov, S.
;
Kartashiov, D.
;
Yafarov, R.
Meeting abstract
2010, X International Conference on Nanostructured Materials - NANO-2010, 14/09/2010, p.77
Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etching

Yanovich, S.
;
Baklanov, Mikhaïl
;
Gushchin, O.
;
Gornev, E.
;
Danila, A.
Meeting abstract
2012, Plasma Etch and Strip in Microelectronics - PESM, 15/03/2012
Nanostructured silicon surface morphology formation under highly ionized microwave plasma conditions

Baklanov, Mikhaïl
;
Guschin, O.
;
Ignatov, P.
;
Yafarov, R.
;
Yanovich, S.
Oral presentation
2011, 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM